[PD-4-3] Controlling Crystalline Orientations of Sol-Gel PZTs for FRAM and DRAM Applications
Katsuhiro Aoki, Yukio Fukuda, Ken Numata, Akitoshi Nishimura
(1.ULSI Development & Productization, Texas Instruments Japan Limited)
https://doi.org/10.7567/SSDM.1994.PD-4-3
