The Japan Society of Applied Physics

[PD-4-3] Controlling Crystalline Orientations of Sol-Gel PZTs for FRAM and DRAM Applications

Katsuhiro Aoki, Yukio Fukuda, Ken Numata, Akitoshi Nishimura (1.ULSI Development & Productization, Texas Instruments Japan Limited)

https://doi.org/10.7567/SSDM.1994.PD-4-3