[PD-4-5] A Novel LOCOS SPI (Self-Aligned-Pocket-Implantation) Technology for a Half Micron NMOSFET

C. J. KIM、H. W. JANG、Y. S. JANG、J. H. JIN、S. K. LIM、K. H CHOI (1.SAMSUNG Electronics, Semiconductor R&D Center, Micro Process Development Buchun)

https://doi.org/10.7567/SSDM.1994.PD-4-5