Advanced Langmuir Probes for RF Discharge Plasmas

Masaki Hirayama; Tadahiro Ohmi

doi:https://doi.org/10.7567/SSDM.1994.PD-4-8

1994 International Conference on Solid State Devices and Materials

1994年8月23日〜 1994年8月26日
Pacifico Yokohama, Yokohama, Japan

[PD-4-8] Advanced Langmuir Probes for RF Discharge Plasmas

Masaki Hirayama、Tadahiro Ohmi (1.Department of Electronics, Faculty of Engineering, Tohoku University、2.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1994.PD-4-8

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