[PD-4-8] Advanced Langmuir Probes for RF Discharge Plasmas

Masaki Hirayama, Tadahiro Ohmi (1.Department of Electronics, Faculty of Engineering, Tohoku University, 2.Laboratory for Microelectronics, Research Institute of Electrical Communication, Tohoku University)

https://doi.org/10.7567/SSDM.1994.PD-4-8