[PD-4-9] Contactless Measurement of Surface Temperature and Surface Potential of Semiconductor by Photoreflectance Spectroscopy

Akira FUJIMOTO Hideo KATSUMI, Masanori OKUYAMA, Yoshihiro HAMAKAWA (1.Department of Electrical Engineering, Wakayama National College of Technology, 2.Department of Electrical Engineering, Faculty of Engineering Science, Osaka University)

https://doi.org/10.7567/SSDM.1994.PD-4-9