[S-I-1-4] Anomalous Step Bunching of a Strained InGaAs Epitaxial Layer Grown on an Off-Angled GaAs Substrate

K. Fukagai、S. Ishikawa (1.Opto-Electronics Research Laboratories, NEC Corporation)

https://doi.org/10.7567/SSDM.1994.S-I-1-4