Formation of High Contrast Periodic Corrugations by Optimizing Optical Parameters of Photoresists in 325nm Laser Holographic Exposure

Kazuya Okamoto; Yoshiaki Nakano; Kunio Tada

doi:https://doi.org/10.7567/SSDM.1994.S-I-11-3

[S-I-11-3] Formation of High Contrast Periodic Corrugations by Optimizing Optical Parameters of Photoresists in 325nm Laser Holographic Exposure

Kazuya Okamoto、Yoshiaki Nakano、Kunio Tada (1.Central Research Laboratory, Nikon Corporation、2.Department of Electronic Engineering, University of Tokyo)

https://doi.org/10.7567/SSDM.1994.S-I-11-3

1994 International Conference on Solid State Devices and Materials

[S-I-11-3] Formation of High Contrast Periodic Corrugations by Optimizing Optical Parameters of Photoresists in 325nm Laser Holographic Exposure