[S-I-11-4] Ultrahigh-Reflectivity (99.8%) InGaP/GaAs Multilayer Reflector Grown by MOCVD for Highly Reliable 0.98-μm VCSELs

K. Shinoda、K. Hiramoto、K. Uomi、T. Tsuchiya (1.Central Research Laboratory, Hitachi Ltd.)

https://doi.org/10.7567/SSDM.1994.S-I-11-4