[S-I-2-3] Stress Relaxation of GaAs on Si by Laser Pulse Irradiation

Hideo UCHIDA, Tetsuo SOGA, Hironobu NISHIKAWA, Takashi JIMBO, Masayoshi UMENO (1.Department of Electrical and Computer Engineering, Instrument and Analysis Center, Department of Physics, Research Center for Micro-Structure Devices, Nagoya Institute of Technology)

https://doi.org/10.7567/SSDM.1994.S-I-2-3