[S-I-4-2] First Application of STM Nano-Meter Size Oxidation Process to Planar-Type MIM Diode

KAZUHIKO MATSUMOTO, Shu Takahashi, Masami Ishii, Masakatsu Hoshi, Akira Kurokawa, Shingo Ichimura, Atsushi Ando (1.Electrotechnical Laboratory MITI, 2.Nissan Motor Co., LTD.)

https://doi.org/10.7567/SSDM.1994.S-I-4-2