Double SOI Structures and Device Applications with Heteroepitaxial Al2O3 and Si

M. ISHIDA; Y. T. LEE; T. HIGASHINO; H. D. SEO; T. NAKAMURA

doi:https://doi.org/10.7567/SSDM.1994.S-II-10

1994 International Conference on Solid State Devices and Materials

Aug 23, 1994 - Aug 26, 1994
Pacifico Yokohama, Yokohama, Japan

[S-II-10] Double SOI Structures and Device Applications with Heteroepitaxial Al2O3 and Si

M. ISHIDA, Y. T. LEE, T. HIGASHINO, H. D. SEO, T. NAKAMURA (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.1994.S-II-10

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