[S-II-10] Double SOI Structures and Device Applications with Heteroepitaxial Al2O3 and Si

M. ISHIDA、Y. T. LEE、T. HIGASHINO、H. D. SEO、T. NAKAMURA (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.1994.S-II-10