The Japan Society of Applied Physics

[S-II-10] Double SOI Structures and Device Applications with Heteroepitaxial Al2O3 and Si

M. ISHIDA, Y. T. LEE, T. HIGASHINO, H. D. SEO, T. NAKAMURA (1.Department of Electrical and Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.1994.S-II-10