Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process

K. Shiozawa; T. Oishi; H. Maeda; T. Murakami; K. Yasumura; Y. Abe; Y. Tokuda

doi:https://doi.org/10.7567/SSDM.1996.PD-4-4

[PD-4-4] Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process

K. Shiozawa, T. Oishi, H. Maeda, T. Murakami, K. Yasumura, Y. Abe, Y. Tokuda (1.Advanced Technology R&D Center, ULSI Laboratory, Mitsubishi Electric Corporation)

https://doi.org/10.7567/SSDM.1996.PD-4-4

1996 International Conference on Solid State Devices and Materials

[PD-4-4] Electrical Characteristics of Ultra-Fine Trench Isolation Fabricated by a New Two-Step Filling Process