Thin Film Silicon on Insulator Substrate Considerations for CMOS Technologies

S. R. Wilson; T. Wetteroth; S. Hong; H. Shin; M. Racanelli; M. Huang

doi:https://doi.org/10.7567/SSDM.1996.Sympo.I-5

[Sympo.I-5] Thin Film Silicon on Insulator Substrate Considerations for CMOS Technologies

S. R. Wilson, T. Wetteroth, S. Hong, H. Shin, M. Racanelli, M. Huang (1.Materials Research and Strategic Technologies Communications Product Laboratories Motorola Semiconductor Products Sector)

https://doi.org/10.7567/SSDM.1996.Sympo.I-5

1996 International Conference on Solid State Devices and Materials

[Sympo.I-5] Thin Film Silicon on Insulator Substrate Considerations for CMOS Technologies