[A-1-3] Sticking Configuration of Boron Atoms from B2H6 on Silicon during Rapid Vapor-Phase Doping

Yukihiro Kiyota、Hideaki Tanaka、Taroh Inada (1.Central Research Laboratory, Hitachi、2.College of Engineering, Hosei University)

https://doi.org/10.7567/SSDM.1998.A-1-3