[A-10-5] Highly Efficient Gettering of Heavy Metals Using Carbon Implanted Eptaxial Si Wafers

Toshihiko Itoga, Kazuyuki Houzawa, Kazuo Takeda, Seiichi Isomae, Makoto Ohkura (1.Central Research Laboratory, Hitachi, Ltd.)

https://doi.org/10.7567/SSDM.1998.A-10-5