[A-2-5] Formation of Very Thin Epitaxial Al2O3 Pre-Layer with Very Smooth Surface on Si(111) Using Protective Oxide Layer

Young-Chul Jung, Hiroyuki Miura, Makoto Ishida (1.Department of Electric and Electronic Engineering, Toyohashi University of Technology)

https://doi.org/10.7567/SSDM.1998.A-2-5