The Japan Society of Applied Physics

[A-5-2] Time Evolution of Mean and Dispersion in Si/SiO2 Interface States Generation Statistics

Yuichiro Mitani, Hideki Satake, Akira Toriumi (1.Advanced Semiconductor Devices Research Laboratories, Toshiba Corp.)

https://doi.org/10.7567/SSDM.1998.A-5-2