[A-5-6] Characterization of the Interface between Plasma-Oxidized SiO2 and Crystalline Silicon by Cathodoluminescence Spectroscopy (CLS)

Joerg SCHAFER, Alex P. YOUNG, Leonard J. BRILLSON Hiro NIIMI, Gerald LUCOVSKY (1.Department of Electrical Engineering, Ohio State University, 2.Department of Physics, North Carolina State University)

https://doi.org/10.7567/SSDM.1998.A-5-6