[A-6-5] A Fluorinated Organic-Silica Film with Extremely Low Dielectric-Constant

Yasutaka Uchida, Kohshi Taguchi, Masakiyo Matsumura (1.Dept. of Electronics and Information Science, Teikyo University of Science and Technology, 2.Dept. of Physical Electronics, Tokyo Institute of Technology)

https://doi.org/10.7567/SSDM.1998.A-6-5