[A-7-2] Transmission Electron Microscopic Study of TiSi2 Microstructures and the C49-C54 Phase Transformation in Narrow Lines

M. Okihara、K. Tai、M. Kageyama、Y. Harada、N. Hirashita、H. Onoda (1.VLSI Research & Development Center, LSI Production Division, Oki Electric Industry Co., Ltd.)

https://doi.org/10.7567/SSDM.1998.A-7-2