[A-8-3] Suppression of Transient Enhanced Diffusion by LOCOS Induced Stress Masaki Okuno, Takayuki Aoyama, Satoshi Nakamura, Hiroshi Arimoto, Kei Horiuchi (1.Fujitsu Laboratories Limited) https://doi.org/10.7567/SSDM.1998.A-8-3
