[A-8-3] Suppression of Transient Enhanced Diffusion by LOCOS Induced Stress Masaki Okuno、Takayuki Aoyama、Satoshi Nakamura、Hiroshi Arimoto、Kei Horiuchi (1.Fujitsu Laboratories Limited) https://doi.org/10.7567/SSDM.1998.A-8-3
