Detection of Particles on Quarter um Thick or Thinner SOI Wafers

Susumu Kuwabara; Kiyoshi Mitani; Yasuo Yatsugake; Yuichiro Kato

doi:https://doi.org/10.7567/SSDM.1998.B-10-3

1998 International Conference on Solid State Devices and Materials

Sep 7, 1998 - Sep 10, 1998
International Conference Center Hiroshima, Hiroshima, Japan

[B-10-3] Detection of Particles on Quarter um Thick or Thinner SOI Wafers

Susumu Kuwabara, Kiyoshi Mitani, Yasuo Yatsugake, Yuichiro Kato (1.Isobe R&D Center, Shin-Etsu Handotai Co., Ltd., 2.Hitachi Electronics Engineering Co., Ltd.)

https://doi.org/10.7567/SSDM.1998.B-10-3

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