[B-6-4] Oxygen Precipitates and Related Defects in SOI Substrate Fabricated by Wafer Bonding and H+ Splitting

Atsushi Ogura、Michio Tajima (1.Silicon Systems Research Laboratories, NEC Corporation、2.Institute of Space and Astronautical Science)

https://doi.org/10.7567/SSDM.1998.B-6-4