[B-8-5] Measurement of Energetic and Lateral Distribution of Interface State Density in FD SOI MOSFETs

Tran Ngoc Duyet、Hiroki Ishikuro、Yi Shi、Takuya Saraya、Makoto Takamiya、Toshiro Hiramoto (1.Institute of Industrial Science, University of Tokyo、2.VLSI Design and Education Center, University of Tokyo)

https://doi.org/10.7567/SSDM.1998.B-8-5