[B-9-1] Excimer-Laser-Induced Fluorine Passivation Effects on Electrical Characteristics and Stability of Poly-Si TFTs

Cheon-Hong Kim、Jae-Hong Jeon、Juhn-Suk Yoo、Kee-Chan Park、Min-Koo Han (1.School of Electrical Engineering, Seoul National University)

https://doi.org/10.7567/SSDM.1998.B-9-1