[B-9-6] Highly Sensitive MOSFET Gas Sensors with Porous Pt-SnOx Gate Electrode for CO Sensing Applications

Kouichirou Kasama、Daisuke Sato、Hisashi Fukuda、Shigeru Nomura (1.Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology)

https://doi.org/10.7567/SSDM.1998.B-9-6