The Japan Society of Applied Physics

[D-10-1] Tight-Binding Molecular Dynamics Simulation of Desorbed SiO Molecule during the Oxidation of Si(111) Surface

Aruba Yamada, Akira Endou, Hiromitsu Takaba, Kazuo Teraishi, S. Salai Cheettu Ammal, Momoji Kubo, Akira Miyamoto, Kazutaka G. Nakamura, Masahiro Kitajima (1.Department of Materials Chemistry, Graduate School of Engineering, Tohoku University, 2.National Research Institute for Metals)

https://doi.org/10.7567/SSDM.1998.D-10-1