[D-10-3] Quantum Chemical Study on the Interaction of NF3 with Si

Akira Endou, Aruba Yamada, Momoji Kubo, Kazuo Teraishi, S. Salai Cheettu Ammal, Akira Miyamoto, Masahiro Kitajima, Thomas W. Little, Fumio S. Ohuchi (1.Department of Materials Chemistry, Graduate School of Engineering, Tohoku University, 2.National Research Institute for Metals, 3.Department of Materials Science and Engineering, University of Washington)

https://doi.org/10.7567/SSDM.1998.D-10-3