[D-10-4] First-Principles Investigation of Imperfect Structures in SiO2: Origins of Charge Traps Inducing Leakage Currents

Ayumi Yokozawa、Yoshiyuki Miyamoto (1.NEC ULSI Device Development Laboratories、2.NEC Fundamental Research Laboratories)

https://doi.org/10.7567/SSDM.1998.D-10-4