[D-3-2] Low Voltage Operation of Ferroelectric Sr0.9Bi2.1Ta2O9 Thin Films Crystallized by Excimer Laser Annealing

Ichiro Koiwa、Kazuya Sano、Takao Kanehara、Hiroyo Kato (1.Semiconductor Technology Laboratory, Oki Electric Industry Co., Ltd.、2.Yokohama Plant, The Japan Steel Works, Ltd.)

https://doi.org/10.7567/SSDM.1998.D-3-2