[D-4-2] Nitridation of GaAs(001) Surface Studied by Auger Electron Spectroscopy

Igor Aksenov, Yoshinobu Nakada, Hajime Okumura (1.Joint Research Center for Atom Technology (JRCAT) - Angstrom Technology Partnership (ATP), 2.Central Research Institute, Mitsubishi Materials Corporation, 3.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1998.D-4-2