[D-4-2] Nitridation of GaAs(001) Surface Studied by Auger Electron Spectroscopy

Igor Aksenov、Yoshinobu Nakada、Hajime Okumura (1.Joint Research Center for Atom Technology (JRCAT) - Angstrom Technology Partnership (ATP)、2.Central Research Institute, Mitsubishi Materials Corporation、3.Electrotechnical Laboratory)

https://doi.org/10.7567/SSDM.1998.D-4-2