[D-4-6] Digital Etching of InP Using Tris-Dimethylaminophosphorus in Ultra-High Vacuum

Nobuyuki Otsuka, Jun-ichi Nishizawa, Yutaka Oyama, Hideyuki Kikuchi, Ken Suto (1.Telecommunications Advancement Organization of Japan, SENDAI Research Center, 2.Semiconductor Research Institute of Semiconductor Research Foundation, 3.Dep. Materials Science and Engineering, Graduate School of Engineering, Tohoku University)

https://doi.org/10.7567/SSDM.1998.D-4-6