[LA-4] Ultra Thin SrBi2Ta2O9 Ferroelectric Films Grown by Liquid Source CVD Using BiOx Buffer Layers

H. Yamawaki, S. Miyagaki, T. Eshita, Y. Arimoto (1.FUJITSU LABORATORIES LTD.)

https://doi.org/10.7567/SSDM.1998.LA-4