[A-10-3] Monte-Carlo Sphere Model for "Effective Oxide Thinning" Induced Extrinsic Breakdown

Huan-Tsung Huang、Ming-Jer Chen、Jyh-Huei Chen Chi-Wen Su、Chin-Shan Hou、Mong-Song Liang (1.Department of Electronics Engineering, National Chiao-Tung University、2.R&D Department, Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.1999.A-10-3