The Japan Society of Applied Physics

[A-10-3] Monte-Carlo Sphere Model for "Effective Oxide Thinning" Induced Extrinsic Breakdown

Huan-Tsung Huang, Ming-Jer Chen, Jyh-Huei Chen Chi-Wen Su, Chin-Shan Hou, Mong-Song Liang (1.Department of Electronics Engineering, National Chiao-Tung University, 2.R&D Department, Taiwan Semiconductor Manufacturing Company)

https://doi.org/10.7567/SSDM.1999.A-10-3