[A-10-4] Interface States due to Intrinsic Defects in Si(100)/SiO2

Chioko Kaneta, Takahiro Yamasaki, Toshihiro Uchiyama, Tsuyoshi Uda, Kiyoyuki Terakura (1.Fujitsu Laboratories Limited, 2.JRCAT-(ATP, NAIR))

https://doi.org/10.7567/SSDM.1999.A-10-4