[A-10-4] Interface States due to Intrinsic Defects in Si(100)/SiO2

Chioko Kaneta、Takahiro Yamasaki、Toshihiro Uchiyama、Tsuyoshi Uda、Kiyoyuki Terakura (1.Fujitsu Laboratories Limited、2.JRCAT-(ATP, NAIR))

https://doi.org/10.7567/SSDM.1999.A-10-4