Structure Control of Ferroelectric Pb(Zr, Ti)O3 Films Using SrTiO3 Buffer Layer Prepared by Metalorganic Decomposition

Hisashi Fukuda; Miho Miura; Kyosuke Ohshima; Motokazu Nishino; Shigeru Nomura

doi:https://doi.org/10.7567/SSDM.1999.A-14-2

[A-14-2] Structure Control of Ferroelectric Pb(Zr, Ti)O3 Films Using SrTiO3 Buffer Layer Prepared by Metalorganic Decomposition

Hisashi Fukuda、Miho Miura、Kyosuke Ohshima、Motokazu Nishino、Shigeru Nomura (1.Department of Electrical and Electronic Engineering, Faculty of Engineering, Muroran Institute of Technology、2.Department of Information Engineering, Hokkaido Polytechnic College)

https://doi.org/10.7567/SSDM.1999.A-14-2

1999 International Conference on Solid State Devices and Materials

[A-14-2] Structure Control of Ferroelectric Pb(Zr, Ti)O3 Films Using SrTiO3 Buffer Layer Prepared by Metalorganic Decomposition