[A-14-3] Improvement of Memory Characteristics of MFIS Structures by Combination of Pulsed Laser Deposited SrBi2Ta2O9 Films and Ultra-Thin SiN Buffer Layers

Takeshi Yamaguchi、Masato Koyama、Shin-ichi Takagi (1.Advanced LSI Technology Laboratory, Toshiba Corporation)

https://doi.org/10.7567/SSDM.1999.A-14-3