[A-15-1] (Ba, Sr)TiO3 Stacked Capacitor Technology for 0.13μm-DRAMs and Beyond

Kazuhiro Eguchi、Katsuhiko Hieda、Junya Nakahira、Masahiro Kiyotoshi、Masaaki Nakabayashi、Soichi Yamazaki、Mitsuaki Izuha、Tomonori Aoyama、Kohji Tsunoda、Jun Lin、Kenro Nakamura、Syoko Niwa、Hiroshi Tomita、Akihiro Shimada、Yusuke Kohyama、Yutaka Ishibashi、Yoshiaki Fukuzumi、Tsunetoshi Arikado、Katsuya Okumura (1.Microelectronics Engineering Laboratory, Semiconductor Company, Toshiba Corporation、2.Technology Development Division, Semiconductor Group, Fujitsu Limited、3.Fujitsu Laboratories Limited)

https://doi.org/10.7567/SSDM.1999.A-15-1