[A-16-1] Etching Characteristics of (Ba, Sr)TiO3 Thin Films in an Inductively Coupled Plasma

Dong-Sing Wuu、Fang-Ching Liau、Nei-Hao Kuo、Ray-Hua Horng、Ming-Kwei Lee (1.Institute of Electrical Engineering, Da-Yeh University、2.Institute of Electrical Engineering, Sun Yat-Sen University)

https://doi.org/10.7567/SSDM.1999.A-16-1