[A-16-1] Etching Characteristics of (Ba, Sr)TiO3 Thin Films in an Inductively Coupled Plasma

Dong-Sing Wuu, Fang-Ching Liau, Nei-Hao Kuo, Ray-Hua Horng, Ming-Kwei Lee (1.Institute of Electrical Engineering, Da-Yeh University, 2.Institute of Electrical Engineering, Sun Yat-Sen University)

https://doi.org/10.7567/SSDM.1999.A-16-1