The Japan Society of Applied Physics

[A-4-1] 25V - 13 mΩ・mm2 Low On-Resistance Novel Structure Trench Gate LDMOS

Yusuke Kawaguchi、Takeshi Sano、Akio Nakagawa (1.Advanced Discrete Semiconductor Technology Laboratory, Toshiba Corporation、2.Microelectronics Center, Toshiba Corporation Semiconductor Company)

https://doi.org/10.7567/SSDM.1999.A-4-1