A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon

H. Ishii; N. Sahri; T. Nagatsuma; K. Machida; K. Saito; S. Yagi; M. Yano; K. Kudo; H. Kyuragi

doi:https://doi.org/10.7567/SSDM.1999.A-5-1

1999 International Conference on Solid State Devices and Materials

Sep 21, 1999 - Sep 24, 1999
Nihon Toshi Center Kaikan, Tokyo, Japan

[A-5-1] A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon

H. Ishii, N. Sahri, T. Nagatsuma, K. Machida, K. Saito, S. Yagi, M. Yano, K. Kudo, H. Kyuragi (1.NTT Telecommunications Energy Laboratories, 2.NTT Advanced Technology Corporation)

https://doi.org/10.7567/SSDM.1999.A-5-1

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