A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon

H. Ishii; N. Sahri; T. Nagatsuma; K. Machida; K. Saito; S. Yagi; M. Yano; K. Kudo; H. Kyuragi

doi:https://doi.org/10.7567/SSDM.1999.A-5-1

1999 International Conference on Solid State Devices and Materials

1999年9月21日〜 1999年9月24日
Nihon Toshi Center Kaikan, Tokyo, Japan

[A-5-1] A New Fabrication Process for Low-Loss Millimeter-Wave Transmission Lines on Silicon

H. Ishii、N. Sahri、T. Nagatsuma、K. Machida、K. Saito、S. Yagi、M. Yano、K. Kudo、H. Kyuragi (1.NTT Telecommunications Energy Laboratories、2.NTT Advanced Technology Corporation)

https://doi.org/10.7567/SSDM.1999.A-5-1

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